Chemical Distribution System
Chemical Distribution Systems are known generally by the following abbreviations: CCSS, CDS or SDS and refer to the product carried and the amount of flow. This specific installation is considered the heart of a microelectronics facility as it energizes the chemical that is transported from main storage to either daily storage or directly up to a tool in a clean room. Due to their function, high purity chemical pumps, high purity dampeners, high purity valves or any components installed in a Chemical Distribution System are critical to maintaining a wafer processing system, keeping it up and running and providing the necessary chemistry that will be processed on the wafer.